Electrical resistivity change in amorphous Ta42Si13N45 films by stress relaxation

Nicolet, M.A.; Ryser, M.; Romano, Valerio (2015). Electrical resistivity change in amorphous Ta42Si13N45 films by stress relaxation Applied Physics, 118(3), pp. 1153-1160. Springer 10.1007/s00339-014-8931-0

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Item Type:

Journal Article (Original Article)

Division/Institute:

Engineering and Information Technology > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS
Engineering and Information Technology

Name:

Nicolet, M.A.;
Ryser, M. and
Romano, Valerio

ISSN:

1432-0630

Publisher:

Springer

Language:

English

Submitter:

Admin import user

Date Deposited:

14 Aug 2019 12:36

Last Modified:

04 Oct 2019 15:21

Publisher DOI:

10.1007/s00339-014-8931-0

ARBOR DOI:

10.24451/arbor.5548

URI:

https://arbor.bfh.ch/id/eprint/5548

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