Remund, Stefan; Gafner, Markus; Chaja, Michalina; Urniežius, Aivaras; Butkus, Simas; Neuenschwander, Beat; Molpeceres, Carlos; Narazaki, Aiko; Qiao, Jie (2021). Comparison of ultrashort pulse laser ablation with GHz pulse bursts and MHz pulse bursts of metals, silicon, and dielectric materials In: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI (p. 10). SPIE 10.1117/12.2583192
Full text not available from this repository. (Request a copy)We investigated GHz pulse bursts ablation on metals, silicon, zirconium dioxide, soda-lime glass and sapphire for surface structuring applications with a commercial laser system providing a burst pulse frequency of 5.4 GHz and a maximum of 25 pulses per burst pulse train. The results on metal show dramatic decrease of the ablation efficiency and a reduction of the machining quality. For silicon we also observed a reduction of the ablation efficiency for GHz pulse bursts but found a strong increase for MHz pulse bursts using a 10 ps laser system. On glass an increase of the ablation rate for GHz pulse bursts was observed, however with pure machining quality indicated by crakes in the surface and boarders. Zirconium oxide was the only investigated material, where a GHz pulse bursts induces a moderate higher ablation efficiency with comparable surface qualities, however a 10% higher ablation rate was obtained with a 10 ps laser system.
Item Type: |
Conference or Workshop Item (Paper) |
|---|---|
Division/Institute: |
School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS > ALPS / Laser Surface Engineering |
Name: |
Remund, Stefan; Gafner, Markus; Chaja, Michalina; Urniežius, Aivaras; Butkus, Simas; Neuenschwander, Beat  0000-0001-9715-8557; Molpeceres, Carlos; Narazaki, Aiko and Qiao, Jie |
Subjects: |
Q Science > QC Physics T Technology > TJ Mechanical engineering and machinery |
ISBN: |
9781510641822 |
Publisher: |
SPIE |
Language: |
English |
Submitter: |
Beat Neuenschwander |
Date Deposited: |
02 Aug 2021 16:08 |
Last Modified: |
04 Nov 2021 21:46 |
Publisher DOI: |
10.1117/12.2583192 |
URI: |
https://arbor.bfh.ch/id/eprint/15219 |
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