Laser Micromachining

Neuenschwander, Beat (2021). Laser Micromachining In: Handbook of Laser Technology and Applications. Handbook of Laser Technology and Applications: Vol. III (pp. 47-69). 6000 Broken Sound Parkway NW, Suite 300, Boca Raton, FL 33487-2742: CRC Press Taylor and Francis Group

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Beat Neuenschwander CONTENTS 5.1 Introduction 5.2 Basics 5.2.1 Energy Transfer 5.2.2 Absorption of Light 5.2.3 Heat Transfer for Long (Nanosecond) Pulses Heat Diffusion Equation Point Source in Infinite Homogeneous 3D Body Linear Heat Conduction Enthalpy Model 5.2.4 Heat Transfer for Ultra-short Pulses Two-temperature Model Metals Dielectrics and Semiconductors 5.2.5 Heat Accumulation 5.3 Optimized Material Removal 5.3.1 Problem 5.3.2 Ablation Efficiency Top Hat Intensity Distribution Gaussian Beam 5.3.3 Specific Removal Rate 5.3.4 Consequences from the Model 5.3.5 Incubation 5.3.6 Influence of the Pulse Duration 5.3.7 Influence on the Machining Quality Metals Semiconductors: Silicon and Germanium 5.4 Power Scale-up for Surface Structuring: Demands, Solutions and Limiting Factors 5.4.1 Surface Structuring 5.4.2 Marking Speed and Power Scale-up 5.4.3 Limiting Factors Heat Accumulation Plasma and Particle Shielding 5.4.4 Pulse Bursts 5.4.5 Alternative Approaches 5.5 Summary and Future Challenges References

Item Type:

Book Section (Book Chapter)


School of Engineering and Computer Science > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS > ALPS / Laser Surface Engineering


Neuenschwander, Beat0000-0001-9715-8557


Q Science > QC Physics




Handbook of Laser Technology and Applications


CRC Press Taylor and Francis Group




Beat Neuenschwander

Date Deposited:

15 Jul 2021 07:38

Last Modified:

04 Nov 2021 21:46


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