High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner

Jaeggi, Beat; Neuenschwander, Beat; Zimmermann, Markus; Penning, L.; deLoor, R.; Weingarten, K.; Oehler, A.; (2014). High-throughput and high-precision laser micromachining with ps-pulses in synchronized mode with a fast polygon line scanner In: SPIE LASE. San Francisco, California, United States. 06.04.2014. 10.1117/12.2037379

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To be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum scan speed of 100 m/s and a 50 W ps-laser system, synchronized via the SuperSync™ technology. We will show the results concerning the removal rate and the surface quality for working at the optimum point i.e. most efficient point at repetition rates up to 8.2 MHz.

Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

Engineering and Information Technology > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS

Name:

Jaeggi, Beat;
Neuenschwander, Beat;
Zimmermann, Markus;
Penning, L.;
deLoor, R.;
Weingarten, K.;
Oehler, A. and

Subjects:

Q Science > QC Physics

Language:

English

Submitter:

Beat Neuenschwander

Date Deposited:

17 Mar 2020 09:38

Last Modified:

20 Sep 2020 02:17

Publisher DOI:

10.1117/12.2037379

Additional Information:

Copyright (2014) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited

ARBOR DOI:

10.24451/arbor.11329

URI:

https://arbor.bfh.ch/id/eprint/11329

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