High throughput surface structuring with ultrashort pulses in synchronized mode with fast polygon line scanner

Neuenschwander, Beat; Jäggi, Beat; Zimmermann, Markus; Penning, Lars; de Loor, Ronny; Weingarten, Kurt; Oehler, Andreas (2013). High throughput surface structuring with ultrashort pulses in synchronized mode with fast polygon line scanner In: ICALEO® 2013: 32nd International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing (pp. 677-685). Laser Institute of America 10.2351/1.5062949

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High precision laser micromachining requires an exact synchronization of the laser pulse train with the mechanical axes of the motion system to ensure for each single pulse a precise control of the laser spot position - on the target. For ultra short pulsed laser systems this was already demonstrated with a conventional two-axis galvanometer scanner. But this solution is limited by the scanner architecture to a marking speed of about 10m/s with a maximum scan line length of about 100mm. It is therefore not suited for average powers far beyond 10W when working at the optimum point with highest removal rate and machining quality is desired. A way to overcome this limitation is offered by polygon line scanners which are able to realize much higher lateral speeds at large scan line lengths. In this work we will report on the results with a polygon line scanner having a maximum moving spot velocity of 100m/s, a scan line length of 170mm, spot diameters of 45µm (1064nm) and 22µm (532nm) together with a 50W, 10-ps laser system. The precise control of the laser spot position i.e. the synchronization is realized via the new SuperSyncTM technology. Decoating, perforation and 3D patterning will act as benchmark processes to evaluate this scanning technology.

Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

Department of Engineering and Information Technology > Institute for Applied Laser, Photonics and Surface Technologies

Name:

Neuenschwander, Beat; Jäggi, Beat; Zimmermann, Markus; Penning, Lars; de Loor, Ronny; Weingarten, Kurt and Oehler, Andreas

Subjects:

Q Science > QC Physics

ISBN:

978-0-912035-98-7

Publisher:

Laser Institute of America

Language:

English

Submitter:

Beat Neuenschwander

Date Deposited:

15 Apr 2020 12:39

Last Modified:

21 Apr 2020 12:22

Publisher DOI:

10.2351/1.5062949

Additional Information:

This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing

ARBOR DOI:

10.24451/arbor.11327

URI:

https://arbor.bfh.ch/id/eprint/11327

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