Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement

Jaeggi, Beat; Neuenschwander, Beat; Hunziker, Urs; Zuercher, Joseph; Meier, Thomas; Zimmermann, Markus; Selbmann, Karl-Heinz; Hennig, Guido (2012). Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement In: SPIE LASE. San Francisco, California, USA. 15.02.2012. 10.1117/12.909844

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Item Type:

Conference or Workshop Item (Paper)

Division/Institute:

Engineering and Information Technology > Institute for Surface Applied Laser, Phototonics and Surface Technologies ALPS

Name:

Jaeggi, Beat;
Neuenschwander, Beat;
Hunziker, Urs;
Zuercher, Joseph;
Meier, Thomas;
Zimmermann, Markus;
Selbmann, Karl-Heinz and
Hennig, Guido

Subjects:

Q Science > QC Physics

Submitter:

Beat Neuenschwander

Date Deposited:

21 Apr 2020 11:39

Last Modified:

21 Apr 2020 11:39

Publisher DOI:

10.1117/12.909844

Additional Information:

Copyright 2012 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited

ARBOR DOI:

10.24451/arbor.11317

URI:

https://arbor.bfh.ch/id/eprint/11317

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