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Haug, F.-J.; Schwaller, Patrick; Wloka, J.; Patscheider, J.; Karimi, A.; Tobler, M. (2004). Stoichiometry dependence of hardness, elastic properties, and oxidation resistance in TiN/SiNx nanocomposites deposited by a hybrid process Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 22(4), pp. 1229-1234. American Vacuum Society (AVS) 10.1116/1.1763907
