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Neuenschwander, Beat; Remund, Stefan Marco; Kramer, Thorsten (2019). Laser machining of silicon with bursts of ultra-short laser pulses: Factors influencing the process efficiency and surface quality (Conference Presentation) In: Račiukaitis, Gediminas; Makimura, Tetsuya; Molpeceres, Carlos (eds.) Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV (p. 2). SPIE 10.1117/12.2513297
Remund, Stefan M.; Chaja, Michalina V.; Zhang, Yiming; Neuenschwander, Beat (2019). Influence of pulse duration in the pico- and femtosecond regime on the absorptance and specific removal rate (Conference Presentation) In: Račiukaitis, Gediminas; Makimura, Tetsuya; Molpeceres, Carlos (eds.) Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV (p. 3). SPIE 10.1117/12.2511294
